Surface state inspecting system including a scanni

专利名称：Surface state inspecting system including a

scanning optical system for scanning asurface to be inspected with a first light andfor simultaneously scanning a diffractiongrating with a second light

发明人：Toshihiko Tsuji,Michio Kohno申请号：US08/374884申请日：19950119公开号：US05591985A公开日：19970107

摘要：A surface state inspecting system includes a scanning optical system forscanning a surface to be inspected, with first light and simultaneously for scanning adiffraction grating with second light, wherein the first light and the second light havemutually different wavelengths and mutually different polarization directions, a lightreceiving optical system for receiving scattered light produced sidewardly from thesurface and diffraction light produced sidewardly from the diffraction grating, and forsuperposing the received lights one upon another, and a photoelectric converting devicefor converting light from the light receiving optical system into an electric signal, whereinthe scanning optical system and the light receiving optical system provide an opticalsystem which is telecentric with respect to the surface to be inspected.

申请人：CANON KABUSHIKI KAISHA

代理机构：Fitzpatrick, Cella, Harper & Scinto

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