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CAPACITOR FOR SEMICONDUCTOR DEVICE AND METHOD FOR

2023-06-10 来源:星星旅游
专利内容由知识产权出版社提供

专利名称:CAPACITOR FOR SEMICONDUCTOR DEVICE

AND METHOD FOR FABRICATING THE SAME

发明人:Seung-Min Lee申请号:US12267566申请日:20081108

公开号:US20090127655A1公开日:20090521

专利附图:

摘要:A capacitor for the semiconductor device may include a bottom electrodeformed over a semiconductor substrate, a dielectric film pattern formed over the bottomelectrode, an insulating member formed over a peripheral portion of the top surface of

the dielectric film pattern, and a top electrode formed over the insulating member anddielectric film pattern. Capacitor properties are improved and capacitor values aremaintained as constant by reducing a parasitic capacitance generated from edges of acapacitor electrode. Therefore, embodiments make it possible to improve semiconductordevice properties and yields.

申请人:Seung-Min Lee

地址:Namyangiu-si KR

国籍:KR

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